Reply to post: Motion control of the Optics

Micron announces EUV fabs by 2024 as it flogs Utah facility to Texas Instruments

Porco Rosso

Motion control of the Optics

If you look how far we are in the motion controls, precision, speed, material knowledge etc of the optics in these Extreme Ultraviolet Lithography Machines its crazy.

The register crew should make a article of that hidden tec

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