Re: Not cleaner, but definitely a squeaky bum moment
I work with both BCl3 (where we do use it for doping poly and amorphous silicon layers) and ClF3 - and both are indeed "interesting" compounds (in the ancient Chinese sense).
The trick is to make sure ClF3 stays gaseous in the supply pipework. If it liquifies, then it's extremely corrosive, and has been known when encountering bends in the pipe to merrily continue straight onward through the wall of the pipework.
An interesting side-note - due to its behaviour in relation to pressure, one of ClF3's earlier usage cases was in WW2 depth charges...
Biting the hand that feeds IT
