Since 2012 more fabs have moved to multipatterning and incremental improvements to the litho and processing equipment have been made. No major process steps have been made. EUV tech is on the brink of being ready. Given past PR statements from ASML and the status of the tech as far as I know I suspect ASML will start shipping production ready systems very soon.
EUV tech is MINDBOGGLINGLY complicated and the amount of new technology and knowledge that had to be created took a LOT more time than anticipated. It's getting close. Really close.