EUV is certainly not dead
EUV is coming. Development is further along than you seem to imply here. Yes, it has taken much longer than expected but when you are fighting the current limits of many many fields of physics and chemistry things don't always go as planned.
Many, many new techniques and processes have been developed just to make EUV a reality. Working tools now exist and are being used for development.
I work in this particular field. If I look over my left shoulder I can see 2 EUV sources being assembled right now in fact.
Biting the hand that feeds IT
