Fair result
20% of Marvell profit on the final sales seems reasonable, Marvell could probably have cut a better deal with Carnegie Mellon if they had licenced the patents when they were first used as the success of these products was not then assured.
9 years of back licensing should be repaid over a 9 year period starting now.
Presumably after 2012 the product was properly licenced or was no longer offered for sale.