Angstrom age angst ameliorated as ASML's High NA EUV chipmaking kit delivers

Research org Imec claims it has demonstrated the viability of ASML's next generation extreme UV technology for next generation chip manufacturing, showing off how it can create patterned structures at a smaller scale than previously possible – in a single pass. IMEC DRAM patterning Imec's DRAM patterning – click to enlarge …

[Anonymous Coward]

Cool litho

The IMEC website has some cool images of the resulting lithography (worth a gander).