That last part.
For all the turmoil and chaos that is the semicon business companies like Global Foundries, TSMC, Intel, etc do NOT like uncertainty about the continued operation and supply of their most critical manufacturing tools. Nikon and ASML are the 2 main players for the most critical step in the whole process. They'll be getting a slap on the back of the head from suppliers soon enough telling them to play nice and share their toys.
Neither party has solid ground to stand on and risks drowning in the patent quicksand if they don't get to stand on each others IP.