The problem occurred when some idiot offered the shark dolphin and chips, during a production run. Being always hungry, the shark nodded, thus ruining its aim, and frying the machine.
First 'production-ready' EUV scanner laser-fries its guts at TSMC. Intel seeks alternative tech
A recent test of the next-generation chip-etching technology known as extreme ultraviolet lithography (EUV) has come a cropper at chip-baking giant Taiwan Semiconductor Manufacturing Company (TSMC). Coincidently, Intel spokesman Chuck Mulloy has confirmed to The Reg a report that his company has joined up with Dutch …
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Tuesday 25th February 2014 23:43 GMT Anonymous Coward
It is still MANY years away
They are an order of magnitude away from a power source that would produce commercially viable quantities of wafers per hour. Yeah, if you look at the industry roadmaps they show a magic hockey-stick like growth in the power output in the next two years to get where we need to be.
Unfortunately that same hockey stick has been in such graphs dealing with EUV power sources since at least 1997.